TY  - BOOK
AU  - Yanda,Richard F.
AU  - Heynes,Michael
AU  - Miller,Anne K.
TI  - Demystifying chipmaking
SN  - 0750677600 (pbk.)
AV  - TK 7868.L6 Y36D 2005
PY  - 2005///
CY  - Oxford
PB  - Elsevier
KW  - LOGIC CIRCUITS
KW  - DESIGN AND CONSTRUCTION
KW  - METAL OXIDE SEMICONDUCTORS, COMPLEMENTARY
KW  - INTEGRATED CIRCUITS
N1  - Includes appendix bibliographical references and index; IC support technologies; Building the transistors; Support technologies; Forming wells; Isolate active areas (shallow trench isolation)
UR  - http://www.loc.gov/catdir/enhancements/fy0626/2005277383-d.html
ER  -